“We have continued to extend our leadership position in HB-LED metrology and process control with our newest PL mapping system, the RPMBlue,” commented Tom Ryan, director of the Materials Characterization Business Unit at Nanometrics. “Our customers in Asia are adopting the high-productivity RPMBlue to support the rapidly-growing application of HB-LEDs for backlighting of notebook and LCD televisions. This latest round of RPMBlue orders comes from end-device manufacturers as well as a leading MOCVD reactor supplier. As the HB-LED process flow becomes increasingly complex, it drives the requirement for improved control of overlay and critical dimensions in the patterning process. Our IVS185 system, shipping for the first time to an HB-LED customer, is a cost-effective solution that incorporates both overlay and CD control in a single tool, with extendibility across multiple substrate sizes.”
Nanometrics offers a comprehensive line of products and technologies for HB-LED metrology and process control, including the RPMBlue for high-volume production of LEDs used in LCD backlighting, the Vertex PL mapping system to support HB-LED process development, and the IVS185 overlay and CD system for advanced LED patterning process control. These systems are used by over 90% of the top-tier HB-LED manufacturers in development and production.
